Invention Grant
- Patent Title: Semiconductor device and electronic appliance
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Application No.: US15784699Application Date: 2017-10-16
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Publication No.: US10431620B2Publication Date: 2019-10-01
- Inventor: Koichi Baba , Takashi Kubodera , Toshihiko Miyazaki , Hiroaki Ammo
- Applicant: SONY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sheridan Ross P.C.
- Priority: JP2012-218098 20120928; JP2013-026749 20130214
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L25/16

Abstract:
The present technique relates to a semiconductor device and an electronic appliance in which the reliability of the fine transistor can be maintained while the signal output characteristic is improved in a device formed by stacking semiconductor substrates.The semiconductor device includes a first semiconductor substrate, a second semiconductor substrate providing a function different from a function provided by the first semiconductor substrate, and a diffusion prevention film that prevents diffusion of a dangling bond terminating atom used for reducing the interface state of the first semiconductor substrate and the second semiconductor substrate, wherein at least two semiconductor substrates are stacked and the semiconductor substrates are electrically connected to each other, and the first semiconductor substrate and the second semiconductor substrate are stacked with the diffusion prevention film inserted between an interface of the first semiconductor substrate and an interface of the second semiconductor substrate.
Public/Granted literature
- US20180053802A1 SEMICONDUCTOR DEVICE AND ELECTRONIC APPLIANCE Public/Granted day:2018-02-22
Information query
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