Provided is a semiconductor structure. In one or more embodiments of the invention, a semiconductor fin on a substrate is provided. A spacer layer is on a surface of the substrate. A high dielectric constant layer is provided, wherein a first portion of the high dielectric constant layer is on sidewalls of the semiconductor fin, and a second portion of the high dielectric constant layer is over the spacer layer. A work function metal layer is on sidewalls of the semiconductor fin, wherein the work function metal layer has a uniform thickness.