Invention Grant
- Patent Title: Thin-film transistor structure with three-dimensional fin-shape channel and preparation method thereof
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Application No.: US15749969Application Date: 2016-07-30
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Publication No.: US10431688B2Publication Date: 2019-10-01
- Inventor: Kai Wang , Hai Ou , Jun Chen
- Applicant: Sun Yat-Sen University , SUN YAT-SEN UNIVERSITY CARNEGIE MELLON UNIVERSITY SHUNDE INTERNATIONAL JOINT RESEARCH INSTITUTE
- Applicant Address: CN Guangdong CN Guangdong
- Assignee: SUN YAT-SEN UNIVERSITY,SUN YAT-SEN UNIVERSITY CARNEGIE MELLON UNIVERSITY SHUNDE INTERNATIONAL JOINT RESEARCH INSTITUTE
- Current Assignee: SUN YAT-SEN UNIVERSITY,SUN YAT-SEN UNIVERSITY CARNEGIE MELLON UNIVERSITY SHUNDE INTERNATIONAL JOINT RESEARCH INSTITUTE
- Current Assignee Address: CN Guangdong CN Guangdong
- Agency: JCIPRNET
- Priority: CN201510472392 20150804
- International Application: PCT/CN2016/092450 WO 20160730
- International Announcement: WO2017/020796 WO 20170209
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/786 ; H01L29/78 ; H01L31/0224 ; H01L29/423

Abstract:
The present invention discloses a thin-film transistor structure with a three-dimensional fin-shape channel and a preparation method thereof. The preparation method includes following steps: (a) depositing and etching a bottom gate electrode on a substrate; (b) depositing a bottom dielectric layer at an upper part of a structure obtained from the step (a), and sequentially depositing a semiconductor film on the bottom dielectric layer; (c) etching the semiconductor film to obtain a fin-type channel; (d) respectively depositing an ohmic contact layer, a source electrode and a drain electrode on the semiconductor film located at both sides of the fin-shape channel, and etching; (e) depositing a top dielectric layer and a top gate electrode at an upper part of a structure obtained from the step (d); and (f) etching the top gate electrode, an completing a preparation of a thin-film transistor with a dual-gate three-dimensional fin-shape channel.
Public/Granted literature
- US20180233599A1 Thin-Film Transistor Structure With Three-Dimensional Fin-Shape Channel And Preparation Method Thereof Public/Granted day:2018-08-16
Information query
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