Invention Grant
- Patent Title: Manufacturing method of an OLED anode and an OLED display device thereof
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Application No.: US15744818Application Date: 2017-11-20
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Publication No.: US10431743B2Publication Date: 2019-10-01
- Inventor: Lei Xing
- Applicant: Wuhan China Star Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Wuhan
- Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee: WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Hauptman Ham, LLP
- Priority: CN201711052745 20171030
- International Application: PCT/CN2017/111885 WO 20171120
- International Announcement: WO2019/085045 WO 20190509
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/52 ; H01L27/32 ; H01L51/56 ; H01L21/027 ; H01L21/47

Abstract:
A manufacturing method of an OLED anode and display device are provided, which the former method comprises the steps: forming an anode-film layer, a material is an ITO, on a substrate; forming a photoresist-film layer on the anode-film layer; patterning the photoresist-film layer to acquire a photoresist-mask pattern, which comprises: an area of photoresist full-retention, photoresist half-retention, and a photoresist full-removal, wherein the photoresist area of half-retention is located between the full-retention and the full-removal; etching the anode film layer to acquire an anode pattern; removing the photoresist half-retention area; perform a plasma treatment to a portion of the anode pattern outside the photoresist full-retention area by adopting a first gas, comprising at least one of O2, N2O, CF4, Ar; removing the photoresist-mask pattern. The disclosure increases the small thickness portion of brightness to compensate for the display unevenness caused by the thickness difference and improve the display quality.
Public/Granted literature
- US20190131529A1 A MANUFACTURING METHOD OF AN OLED ANODE AND AN OLED DISPLAY DEVICE THEREOF Public/Granted day:2019-05-02
Information query
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