Invention Grant
- Patent Title: Bonded body and elastic wave element
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Application No.: US16135655Application Date: 2018-09-19
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Publication No.: US10432169B2Publication Date: 2019-10-01
- Inventor: Tomoyoshi Tai , Masashi Goto , Yudai Uno , Shinya Kaneko
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya, Aichi
- Assignee: NGK INSULATORS, LTD.
- Current Assignee: NGK INSULATORS, LTD.
- Current Assignee Address: JP Nagoya, Aichi
- Agency: Flynn Thiel, P.C.
- Priority: JP2016-061713 20160325
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/09 ; H01L41/187 ; H01L41/313 ; H01L41/337 ; H03H9/25 ; H03H3/08

Abstract:
A bonded body includes a supporting body composed of a ceramic, a bonding layer provided over a surface of the supporting body and composed of one or more material selected from the group consisting of mullite, alumina, tantalum pentoxide, titanium oxide and niobium pentoxide, and a piezoelectric single crystal substrate bonded with the bonding layer. The surface of the supporting body has an arithmetic average roughness Ra of 0.5 nm or larger and 5.0 nm or smaller.
Public/Granted literature
- US20190036509A1 BONDED BODY AND ELASTIC WAVE ELEMENT Public/Granted day:2019-01-31
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