Method for monitoring the energy density of a laser beam by image analysis and corresponding device
Abstract:
A method for monitoring the energy density of a laser beam using parameters of the laser beam including regularly applying the laser beam to a reference substrate and measuring, with each application, the resulting light intensity; identifying a change in the light intensity on the reference substrate between at least two measurements; and, when the change in the light intensity is higher than a predetermined threshold, determining the unstable parameter or parameters of the energy density of the laser beam.
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