- Patent Title: Void forming composition, semiconductor device provided with voids formed using composition, and method for manufacturing semiconductor device using composition
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Application No.: US15313670Application Date: 2015-05-26
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Publication No.: US10435555B2Publication Date: 2019-10-08
- Inventor: Shigemasa Nakasugi , Takafumi Kinuta , Go Noya
- Applicant: AZ Electronic Materials (Luxembourg) S.a.r.l.
- Applicant Address: LU
- Assignee: AZ Electronic Materials (Luxembourg) S.a.r.l
- Current Assignee: AZ Electronic Materials (Luxembourg) S.a.r.l
- Current Assignee Address: LU
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2014-111552 20140529
- International Application: PCT/JP2015/065030 WO 20150526
- International Announcement: WO2015/182581 WO 20151203
- Main IPC: C08L65/02
- IPC: C08L65/02 ; C08G61/12 ; C08L65/00 ; H01L23/532 ; H01L21/768 ; C08L71/00 ; C08L71/12 ; C08L77/10 ; C08L79/02 ; C08L81/02 ; C08L81/06 ; C08G73/02 ; C08L85/02 ; C08L85/04

Abstract:
To provide a composition for gap formation capable of forming sacrifice areas made of a sacrificial material decomposable completely into vapor at a desired temperature, and also to provide a semiconductor device-manufacturing method using the composition.Disclosed is a composition for gap formation comprising a polymer and a solvent:wherein said polymer comprising five or more of repeating units which are represented by at least one kind of the following formula (1) or (2): Ar1-L1 (1) Ar2-L2-Ar2′ (2) [each of Ar1, Ar2 and Ar2′ is independently a substituted or unsubstituted aromatic group; and each of L1 and L2 is independently oxygen, sulfur, alkyl, sulfone, amide, ketone or a group represented by the following formula (3): {Ar3 is an aromatic group; and L3 is a trivalent atom selected from the group consisting of nitrogen, boron and phosphorus}].
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