A spray material comprising rare earth element oxyfluoride particles having an aspect ratio of up to 2, an average particle size of 10-100 μm, and a bulk density of 0.8-2 g/cm3, and containing not more than 0.5 wt % of carbon and 3-15 wt % of oxygen is suitable for air plasma spraying. An article having a sprayed coating of rare earth element oxyfluoride has high resistance against plasma etching and a long lifetime.