Invention Grant
- Patent Title: Polishing composition
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Application No.: US15769889Application Date: 2016-10-20
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Publication No.: US10435588B2Publication Date: 2019-10-08
- Inventor: Noriaki Sugita , Mika Tazuru , Takayuki Matsushita , Shuhei Matsuda
- Applicant: NITTA HAAS INCORPORATED
- Applicant Address: unknown Osaka-Shi, Osaka
- Assignee: NITTA HAAS INCORPORATED
- Current Assignee: NITTA HAAS INCORPORATED
- Current Assignee Address: unknown Osaka-Shi, Osaka
- Agency: Hauptman Ham, LLP
- Priority: JP2015-209327 20151023
- International Application: PCT/JP2016/081115 WO 20161020
- International Announcement: WO2017/069202 WO 20170427
- Main IPC: C09G1/02
- IPC: C09G1/02 ; C09G1/16 ; B24B37/00 ; C08F216/06 ; H01L21/02 ; C09K3/14 ; H01L21/321

Abstract:
A polishing composition that can suppress surface defects and reduce haze is provided. A polishing composition includes: abrasives; at least one water-soluble polymer selected from vinyl alcohol-based resins having a 1,2-diol structural unit; and an alkali compound, where an average particle size of particles in the polishing composition measured by dynamic light scattering is not more than 55 nm. Preferably, the polishing composition further includes a non-ionic surfactant. Preferably, the polishing composition further includes a polyalcohol.
Public/Granted literature
- US20180305580A1 POLISHING COMPOSITION Public/Granted day:2018-10-25
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