Invention Grant
- Patent Title: Apparatus for growing single crystalline ingot and method for growing same
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Application No.: US15752719Application Date: 2016-06-07
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Publication No.: US10435809B2Publication Date: 2019-10-08
- Inventor: Do-Won Song , Hong-Woo Lee , Sang-Hee Kim , Ho-Jun Lee , Jung-Ryul Kim
- Applicant: SK SILTRON CO., LTD.
- Applicant Address: KR Gumi-Si
- Assignee: SK Siltron Co., Ltd.
- Current Assignee: SK Siltron Co., Ltd.
- Current Assignee Address: KR Gumi-Si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: KR10-2015-0116605 20150819
- International Application: PCT/KR2016/006008 WO 20160607
- International Announcement: WO2017/030275 WO 20170223
- Main IPC: C30B15/22
- IPC: C30B15/22 ; C30B15/20 ; C30B29/06 ; C30B30/04 ; C30B15/30

Abstract:
The present invention relates to an apparatus for growing a single crystal ingot capable of uniformly controlling an oxygen concentration in a longitudinal direction and a radial direction of a single crystal ingot by uniformly maintaining a convection pattern on a silicon melt interface, and a method for growing the same. In an apparatus for growing a single crystal ingot and a method for growing the same according to the present invention, a horizontal magnet is positioned to be movable up and down by a magnet moving unit around a crucible, so that a maximum gauss position (MGP) is positioned to be higher than the silicon melt interface and simultaneously, a rate of increase in the MGP is controlled to 3.5 mm/hr to 6.5 mm/hr, and thus it possible to secure simplicity and symmetry of convection on the silicon melt interface. Accordingly, in the present invention, it is possible to reduce an Oi deviation and a BMD deviation in a longitudinal direction and a radial direction of a single crystal ingot, thereby improving quality.
Public/Granted literature
- US20180237939A1 APPARATUS FOR GROWING SINGLE CRYSTALLINE INGOT AND METHOD FOR GROWING SAME Public/Granted day:2018-08-23
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