- Patent Title: Heterogeneous material integration through guided lateral growth
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Application No.: US14379088Application Date: 2013-02-19
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Publication No.: US10435812B2Publication Date: 2019-10-08
- Inventor: Jung Han
- Applicant: Yale University
- Applicant Address: US CT New Haven
- Assignee: Yale University
- Current Assignee: Yale University
- Current Assignee Address: US CT New Haven
- Agency: Wolf, Greenfield & Sacks, P.C.
- International Application: PCT/US2013/026743 WO 20130219
- International Announcement: WO2013/158210 WO 20131024
- Main IPC: C30B25/04
- IPC: C30B25/04 ; C30B25/18 ; H01L21/02 ; C30B25/16 ; C30B29/40 ; C30B25/22

Abstract:
Methods are provided for generating a crystalline material. The methods comprise depositing a textured thin film in a growth seed area, wherein the textured thin film has a preferential crystallographic axis; providing a growth channel extending from the growth seed area, the growth channel permitting guided lateral growth; and growing a crystalline material in the growth channel along a direction that is substantially perpendicular to the preferential crystallographic axis of the textured thin film. A preferred crystalline material is gallium nitride, and preferred textured thin films are aluminum nitride and titanium nitride.
Public/Granted literature
- US20160017515A1 HETEROGENEOUS MATERIAL INTEGRATION THROUGH GUIDED LATERAL GROWTH Public/Granted day:2016-01-21
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