Invention Grant
- Patent Title: Confocal microscope for determination of a layer thickness and microscopy method for determination of a layer thickness
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Application No.: US16042383Application Date: 2018-07-23
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Publication No.: US10436571B2Publication Date: 2019-10-08
- Inventor: Matthias Vaupel , Nils Langholz
- Applicant: Carl Zeiss Microscopy GmbH
- Applicant Address: DE Jena
- Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee: Carl Zeiss Microscopy GmbH
- Current Assignee Address: DE Jena
- Agency: LaBatt, LLC
- Priority: DE102017116745 20170725
- Main IPC: G01B11/06
- IPC: G01B11/06 ; G01B9/02 ; G02B21/00

Abstract:
A confocal microscope for determination of a layer thickness comprises: a focus adjusting device configured to adjust a relative displacement between a focus position of the illumination light and a specimen position along an optical axis, wherein measurement signals belonging to different settings of the focus adjusting device can be recorded; an evaluation device for determining a specimen layer thickness as follows: determine intensity band positions of two intensity bands in a measurement graph recorded by a light measuring device, the measurement graph indicating a light intensity in dependence of the focus position; determine a layer thickness on the basis of a positional difference between the intensity band positions; and determine the layer thickness using a mathematical model which describes for overlapping intensity bands a dependence of the intensity band positions on a light wavelength and the layer thickness, considering interference of the illumination light at the layer.
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