Micro flexible force sensor
Abstract:
Embodiments relate generally to a sensor device, method, and system are provided for housing a sensor. An example force sensor includes an actuation element, a sense die, and a universal housing for holding a sense die. The universal housing has a top wall, a bottom wall, two side walls, and a back wall that define a cavity. The sense die is disposed within the cavity. The top wall defines an aperture having a first central axis therethrough. The housing defines an opening between the top wall and bottom wall extending from an exterior of the housing to the cavity. The opening has a second central axis and is configured to receive the sense die therethrough. At least a portion of the actuation element extends from the cavity through the aperture. The first central axis is orthogonal to the second central axis.
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