Invention Grant
- Patent Title: Photo-acoustic device and method for non-contact measurement of thin layers
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Application No.: US15702822Application Date: 2017-09-13
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Publication No.: US10436754B2Publication Date: 2019-10-08
- Inventor: Heinrich Prinzhorn , Stefan Erdmann , Thomas Wuttke , Andreas Bauer , Bernd Abel , Ales Charvat
- Applicant: Novelis Inc.
- Applicant Address: US GA Atlanta
- Assignee: NOVELIS INC.
- Current Assignee: NOVELIS INC.
- Current Assignee Address: US GA Atlanta
- Agency: Kilpatrick Townsend & Stockton LLP
- Main IPC: G01N29/24
- IPC: G01N29/24 ; G01N29/024 ; G01B17/02 ; G01N29/04 ; G01N29/44 ; G01N21/17

Abstract:
A measuring device for non-mechanical-contact measurement of a layer, the measuring device including a light source operative to generate a pulse adapted to interact with the layer so as to generate a thermal wave in a gas medium present adjacent the layer. The thermal wave causes an acoustic signal to be generated. The measuring device further includes a detector adapted to detect a first signal responsive to the acoustic signal, the detector not being in mechanical contact with the layer. The first signal is representative of the measured layer.
Public/Granted literature
- US20180003679A1 PHOTO-ACOUSTIC DEVICE AND METHOD FOR NON-CONTACT MEASUREMENT OF THIN LAYERS Public/Granted day:2018-01-04
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