Invention Grant
- Patent Title: Line beam forming device
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Application No.: US15542876Application Date: 2015-06-19
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Publication No.: US10437072B2Publication Date: 2019-10-08
- Inventor: Jinbae Moon , Hyejung Kim , Sanggil Ryu
- Applicant: PHILOPTICS CO., LTD.
- Applicant Address: KR
- Assignee: PHILOPTICS CO., LTD
- Current Assignee: PHILOPTICS CO., LTD
- Current Assignee Address: KR
- Agency: Mendelsohn Dunleavy, P.C.
- Priority: KR10-2015-0082119 20150610
- International Application: PCT/KR2015/006268 WO 20150619
- International Announcement: WO2016/199971 WO 20161215
- Main IPC: G02B27/09
- IPC: G02B27/09 ; H01S3/00 ; H01S5/40

Abstract:
Provided is a line beam forming device that can divide a laser beam into beam segments in a first direction (y-axis) perpendicular to the traveling direction (z-axis) of the laser beam, and arrange and emit the beam segments with regular intervals in a second direction (x-axis) perpendicular to the traveling direction of the laser beam, using a single mirror set composed of a plurality of mirrors. The line beam forming device of the present invention can be used for an excimer laser which is a multimode laser beam generator with high beam divergence, a high-power DPSS laser, or a laser diode, can obtain high-density energy by condensing beams, can obtain a beam profile having uniform intensity in both of a long axis and a short axis, and can combine a plurality of laser beams without being influenced by the properties of an incident beam.
Public/Granted literature
- US20180011330A1 LINE BEAM FORMING DEVICE Public/Granted day:2018-01-11
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