Invention Grant
- Patent Title: Cationically polymerizable resist underlayer film-forming composition
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Application No.: US15563834Application Date: 2016-03-18
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Publication No.: US10437151B2Publication Date: 2019-10-08
- Inventor: Hiroto Ogata , Shigeo Kimura , Yuki Usui , Tomoya Ohashi , Takahiro Kishioka
- Applicant: NISSAN CHEMICAL INDUSTRIES, LTD.
- Applicant Address: JP Tokyo
- Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee: NISSAN CHEMICAL INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2015-073686 20150331
- International Application: PCT/JP2016/058744 WO 20160318
- International Announcement: WO2016/158509 WO 20161006
- Main IPC: G03F7/11
- IPC: G03F7/11 ; C08G59/20 ; C09D163/00 ; G03F7/09

Abstract:
There is provided a composition for forming a resist underlayer film for lithography that can be used as an underlayer anti-reflective coating that decreases the reflection of irradiated light during exposure from a semiconductor substrate toward the photoresist layer that is formed on the semiconductor substrate and in particular, can be suitably used as a flattening film for flattening a semiconductor substrate having a recess and a project by embedding, in a lithography process for production of a semiconductor device. A resist underlayer film-forming composition for lithography comprising (A) an alicyclic epoxy compound having an alicyclic skeleton and one or more epoxy groups, and a light absorption moiety, in the molecule, (B) a thermal acid generator, and (C) a solvent.
Public/Granted literature
- US20180081274A1 CATIONICALLY POLYMERIZABLE RESIST UNDERLAYER FILM-FORMING COMPOSITION Public/Granted day:2018-03-22
Information query
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