Invention Grant
- Patent Title: Simultaneous hydrophilization of photoresist and metal surface preparation: methods, systems, and products
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Application No.: US14940052Application Date: 2015-11-12
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Publication No.: US10438804B2Publication Date: 2019-10-08
- Inventor: Eric Frank Schulte
- Applicant: Ontos Equipment Systems
- Applicant Address: US NH Chester
- Assignee: Ontos Equipment Systems
- Current Assignee: Ontos Equipment Systems
- Current Assignee Address: US NH Chester
- Agency: Groover & Associates PLLC
- Agent Robert O. Groover, III; Gwendolyn G. Corcoran
- Main IPC: H01L21/288
- IPC: H01L21/288 ; H01L21/027 ; H01L21/3105 ; H01L21/768 ; H01L21/02 ; C25D7/12 ; C25D17/00 ; C25D5/02 ; C25D5/34

Abstract:
Methods and systems for using the downstream active residuals of a reducing-chemistry atmospheric plasma to provide multiple advantages to pre-plating surface preparation with a simple apparatus. As the downstream active species of the atmospheric plasma impinge the substrate surface, three important surface preparation processes can be performed simultaneously: 1. Organic residue is removed from the surface of the plating base. 2. Oxidation is removed from the surface of the plating base. 3. All surfaces on the substrate are highly activated by the downstream active residuals thus creating a highly wettable surface for subsequent plating operations.
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