Invention Grant
- Patent Title: Method for prefixing of substrates
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Application No.: US16294235Application Date: 2019-03-06
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Publication No.: US10438822B2Publication Date: 2019-10-08
- Inventor: Friedrich Paul Lindner
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/3205 ; H01L21/68 ; H01L21/20 ; H01L21/02 ; H01L21/60
Abstract:
A method and a device for prefixing substrates, whereby at least one substrate surface of the substrates is amorphized in at least one surface area, characterized in that the substrates are aligned and then make contact and are prefixed on the amorphized surface areas.
Public/Granted literature
- US20190198362A1 METHOD FOR PREFIXING OF SUBSTRATES Public/Granted day:2019-06-27
Information query
IPC分类:
