Invention Grant
- Patent Title: Methods and systems for spin-coating multi-layer thin films having liquid conservation features
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Application No.: US16081523Application Date: 2017-06-30
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Publication No.: US10438827B2Publication Date: 2019-10-08
- Inventor: Bob E. Feller , James M. Ian Bennett
- Applicant: Carbon, Inc.
- Applicant Address: US CA Redwood City
- Assignee: Carbon, Inc.
- Current Assignee: Carbon, Inc.
- Current Assignee Address: US CA Redwood City
- Agency: Myers Bigel, P.A.
- International Application: PCT/US2017/040363 WO 20170630
- International Announcement: WO2018/006011 WO 20180104
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/288 ; H01L21/683 ; H01L21/768
Abstract:
A system for retaining a spin-coating fluid when forming a thin film includes a rotatable chuck; a substrate on the rotatable chuck, the substrate having an interior area and an outer perimeter edge; and a fluid retention wall on the outer perimeter edge of the substrate, the fluid retention wall being configured to retain a spin-coating fluid deposited on the interior area of the substrate during rotation of the rotatable chuck.
Public/Granted literature
- US20190019700A1 METHODS AND SYSTEMS FOR SPIN-COATING MULTI-LAYER THIN FILMS HAVING LIQUID CONSERVATION FEATURES Public/Granted day:2019-01-17
Information query
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