Invention Grant
- Patent Title: Pin control method
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Application No.: US15951583Application Date: 2018-04-12
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Publication No.: US10438834B2Publication Date: 2019-10-08
- Inventor: Shin Matsuura , Masato Horiguchi
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: JP2017-080697 20170414
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/68 ; H01L21/3065 ; H01L21/677 ; H01L21/67

Abstract:
A pin control method includes: measuring respective height positions of a plurality of pins, which is vertically driven respectively by a plurality of driving units while supporting a substrate; selecting a reference pin, which serves as a reference for speed control, from the plurality of pins using the measured height positions of the plurality of pins; estimating, with respect to the selected reference pin, a reference height position, which is a height position after a predetermined time has passed since the height positions of the plurality of pins were measured; calculating an adjustment speed for making the height positions of the pins other than the reference pin match with the estimated reference height position; controlling the driving units, which drive the other pins, to adjust driving speeds of the other pins to the adjustment speed.
Public/Granted literature
- US20180301369A1 PIN CONTROL METHOD AND SUBSTRATE PROCESSING APPARATUS Public/Granted day:2018-10-18
Information query
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