Invention Grant
- Patent Title: Method for direct bonding with self-alignment using ultrasound
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Application No.: US15746041Application Date: 2016-07-26
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Publication No.: US10438921B2Publication Date: 2019-10-08
- Inventor: Frank Fournel , Xavier Baillin , Séverine Cheramy , Patrick Leduc , Loic Sanchez
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1557402 20150731
- International Application: PCT/EP2016/067827 WO 20160726
- International Announcement: WO2017/021231 WO 20170209
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/00

Abstract:
A method for direct bonding an electronic chip onto a substrate or another electronic chip, the method including: carrying out a hydrophilic treatment of a portion of, a surface of the electronic chip and of a portion of a surface of the substrate or of the other electronic chip; depositing an aqueous fluid on the portion of the surface of the substrate or of the second electronic chip; depositing the portion of the surface of the electronic chip on the aqueous fluid; drying the aqueous fluid until the portion of the surface of the electronic chip is rigidly connected to the portion of the surface of the substrate or of the other electronic chip: and during at least part of the drying of the aqueous fluid, emitting ultrasound into the aqueous fluid through the substrate or the other electronic chip.
Public/Granted literature
- US20180218997A1 METHOD FOR DIRECT BONDING WITH SELF-ALIGNMENT USING ULTRASOUND Public/Granted day:2018-08-02
Information query
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