Invention Grant
- Patent Title: Nanosheet device with close source drain proximity
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Application No.: US15847894Application Date: 2017-12-19
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Publication No.: US10439049B2Publication Date: 2019-10-08
- Inventor: Veeraraghavan S. Basker , Shogo Mochizuki , Alexander Reznicek
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffmann & Baron, LLP
- Agent L. Jeffrey Kelly, Esq.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L29/10 ; H01L29/167 ; H01L29/08 ; H01L21/3065 ; H01L29/423 ; H01L21/306

Abstract:
A nanosheet transistor device having reduced access resistance is fabricated by recessing channel nanosheets and replacing the channel material with epitaxially grown doped extension regions. Sacrificial semiconductor layers between the channel nanosheets are selectively removed without damaging source/drain regions epitaxially grown on the extension regions. The sacrificial semiconductor layers are replaced by gate dielectric and gate metal layers.
Public/Granted literature
- US20190189769A1 NANOSHEET DEVICE WITH CLOSE SOURCE DRAIN PROXIMITY Public/Granted day:2019-06-20
Information query
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