Invention Grant
- Patent Title: Nanoparticle with plural functionalities, and method of forming the nanoparticle
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Application No.: US15691800Application Date: 2017-08-31
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Publication No.: US10439136B2Publication Date: 2019-10-08
- Inventor: Qing Cao , Kangguo Cheng , Zhengwen Li , Fei Liu
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: McGinn IP Law Group, PLLC
- Agent Vazken Alexanian
- Main IPC: H01L21/31
- IPC: H01L21/31 ; H01L21/469 ; H01L21/00 ; H01L49/02 ; H01L21/02 ; H01L21/78 ; A61K9/14 ; B82Y5/00 ; B82Y40/00
Abstract:
A method of forming a nanoparticle includes forming a layer of semiconductor material on a substrate, forming a first layer on the semiconductor material, and etching the semiconductor layer to form the nanoparticle including the first layer on a first side of the nanoparticle and the semiconductor material on a second side of the nanoparticle.
Public/Granted literature
- US20180026186A1 NANOPARTICLE WITH PLURAL FUNCTIONALITIES, AND METHOD OF FORMING THE NANOPARTICLE Public/Granted day:2018-01-25
Information query
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