Invention Grant
- Patent Title: Acoustic wave device including multiple dielectric films
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Application No.: US15332279Application Date: 2016-10-24
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Publication No.: US10439585B2Publication Date: 2019-10-08
- Inventor: Tomohiro Iwasaki , Hiroyuki Nakamura , Toru Yamaji , Mitsunori Miyanari , Masahiro Yasumi , Shoji Okamoto
- Applicant: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Applicant Address: JP Kadoma-Shi
- Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee: SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Current Assignee Address: JP Kadoma-Shi
- Agency: Lando & Anastasi, LLP
- Priority: JP2013-027414 20130215; JP2013-047493 20130311; JP2013-187919 20130911
- Main IPC: H03H3/10
- IPC: H03H3/10 ; H03H3/08 ; H03H9/02 ; H03H9/13

Abstract:
An acoustic wave device comprises an IDT electrode disposed above an upper surface of a piezoelectric substrate and includes a plurality of electrode fingers configured to excite a main acoustic wave. A first dielectric film made of an oxide is disposed above the upper surface of the piezoelectric substrate and covers the plurality of electrode fingers. A second dielectric film made of non-oxide is disposed between the first dielectric film and each of the plurality of electrode fingers. A third dielectric film is disposed between the piezoelectric substrate and the plurality of electrode fingers. A speed of a transverse wave propagating through the third dielectric film is greater than a speed of the main acoustic wave propagating through the piezoelectric substrate. The third dielectric film contacts the first dielectric film between adjacent electrode fingers of the plurality of electrode fingers.
Public/Granted literature
- US20170040969A1 ACOUSTIC WAVE DEVICE INCLUDING MULTIPLE DIELECTRIC FILMS Public/Granted day:2017-02-09
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