Invention Grant
- Patent Title: Bulk acoustic wave resonator and filter including the same
-
Application No.: US15452090Application Date: 2017-03-07
-
Publication No.: US10439589B2Publication Date: 2019-10-08
- Inventor: Tae Kyung Lee , Jae Sang Lee , Ran Hee Shin , In Young Kang , Sung Sun Kim , Sung Han
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2016-0079366 20160624; KR10-2017-0012948 20170126
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H9/54 ; H03H9/13 ; H03H9/60
Abstract:
A bulk acoustic wave resonator includes a substrate, a first electrode and a second electrode formed on the substrate, and a piezoelectric layer provided between the first electrode and the second electrode. Either one or both of the first electrode and the second electrode include a molybdenum-tungsten alloy having a weight ratio of molybdenum to tungsten in a range of 3:1 to 1:3.
Public/Granted literature
- US20170373665A1 BULK ACOUSTIC WAVE RESONATOR AND FILTER INCLUDING THE SAME Public/Granted day:2017-12-28
Information query
IPC分类:
