Invention Grant
- Patent Title: Storage device and photoresist coating and developing machine having storage device
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Application No.: US15575811Application Date: 2017-04-20
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Publication No.: US10446424B2Publication Date: 2019-10-15
- Inventor: Zhichao Wang , Xiangyu Song , Yongbing Guan , Bingqiang Liu , Kun Cao
- Applicant: BOE TECHNOLOGY GROUP CO., LTD. , Chongqing BOE Optoelectronics Technology Co., Ltd.
- Applicant Address: CN Beijing CN Chongqing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.,CHONGQING BOE OPTOELECTRONICS CO., LTD.
- Current Assignee Address: CN Beijing CN Chongqing
- Agency: Kinney & Lange, P.A.
- Priority: CN201620433712U 20160511
- International Application: PCT/CN2017/081243 WO 20170420
- International Announcement: WO2017/193788 WO 20171116
- Main IPC: H01L21/673
- IPC: H01L21/673 ; G03F7/16 ; B65G1/10
Abstract:
A storage device and a photoresist coating and developing machine having a storage device are disclosed. The storage device includes a frame and a plurality of layers of support plates disposed in sequence in the frame in a height direction of the frame, being used for receiving substrates to be exposed. The frame is provided with a plurality of layers of support members respectively associated with the plurality of layers of support plates, and each layer of the support plates is slidably mounted on the support member.
Public/Granted literature
- US20180130682A1 STORAGE DEVICE AND PHOTORESIST COATING AND DEVELOPING MACHINE HAVING STORAGE DEVICE Public/Granted day:2018-05-10
Information query
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