Semiconductor structures and fabrication methods thereof
Abstract:
A semiconductor structure includes a substrate. The substrate includes a plurality of function regions and a plurality of heat-dissipation regions. Each heat-dissipation region is adjacent to at least one function region. The semiconductor structure also includes a plurality of active fin structures, protruding from the substrate of the plurality of function regions; a plurality of channel layers, each formed on an active fin structure; and a plurality of heat-dissipation fin structures, protruding from the substrate of the plurality of heat-dissipation regions.
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