Invention Grant
- Patent Title: Wafer bonding methods and wafer-bonded structures
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Application No.: US15919940Application Date: 2018-03-13
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Publication No.: US10446519B2Publication Date: 2019-10-15
- Inventor: Jin Guang Cheng , Lin Bo Shi , Fu Cheng Chen
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201710156402 20170316
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/00 ; H01L25/065 ; H01L21/027 ; H01L21/311

Abstract:
A wafer bonding method includes providing a first wafer including a first wafer surface, forming a first metal layer on the first wafer surface, and forming a first annular retaining wall structure including a first annular retaining wall and a second annular retaining wall surrounded by the first annular retaining wall. The first metal layer is formed between the first annular retaining wall and the second annular retaining wall. The method includes providing a second wafer including a second wafer surface, forming a second metal layer on the second wafer surface, and forming a second annular retaining wall structure including a third annular retaining wall and a fourth annular retaining wall surrounded by the third annular retaining wall. The second metal layer is formed between the third annular retaining wall and the fourth annular retaining wall. The method further includes bonding the first metal layer to the second metal layer.
Public/Granted literature
- US20180269178A1 WAFER BONDING METHODS AND WAFER-BONDED STRUCTURES Public/Granted day:2018-09-20
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