Invention Grant
- Patent Title: 3-dimensional printing process for integrated magnetics
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Application No.: US15473564Application Date: 2017-03-29
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Publication No.: US10446639B2Publication Date: 2019-10-15
- Inventor: Lulu Peng , Donald Ray Disney , Lawrence Selvaraj Susai , Rajesh Sankaranarayanan Nair
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Thompson Hine LLP
- Main IPC: H01L49/02
- IPC: H01L49/02 ; B33Y10/00 ; B22F3/105 ; B23K26/342 ; B23K26/00 ; B33Y80/00 ; H01L21/3205 ; H01F41/16 ; H01F41/22 ; B23K15/00 ; B23K26/08 ; B23K26/082 ; B29C64/153 ; C23C24/10 ; H01F17/00 ; H01F41/04 ; B29K79/00 ; B29L31/34 ; B23K101/40 ; B23K103/16 ; B23K101/42 ; B23K103/12

Abstract:
Integrated circuits (ICs) and method for forming IC devices are presented. In one embodiment, a method of forming a device with an integrated magnetic component using 3-dimensional (3-D) printing is disclosed. The method includes providing a substrate with a base dielectric layer, the base dielectric layer serves as a base for the integrated magnetic component. A first metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A magnetic core is formed on the substrate by spray coating magnet powder over the substrate and performing selective laser sintering on the magnet powder. A second metal layer is formed on the substrate by spray coating metal powder over the substrate and performing selective laser melting on the metal powder. A patterned dielectric layer separates the first and second metal layers and the magnetic core.
Public/Granted literature
- US20180286940A1 A 3-DIMENSIONAL PRINTING PROCESS FOR INTEGRATED MAGNETICS Public/Granted day:2018-10-04
Information query
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