Invention Grant
- Patent Title: Piezoelectric MEMS resonator with integrated phase change material switches
-
Application No.: US15304919Application Date: 2015-04-17
-
Publication No.: US10447234B2Publication Date: 2019-10-15
- Inventor: Matteo Rinaldi , Gwendolyn Hummel
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Verrill Dana LLP
- International Application: PCT/US2015/026480 WO 20150417
- International Announcement: WO2015/161257 WO 20151022
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H03H9/13 ; H03H3/02 ; H03H9/02 ; H01L45/00 ; H01L41/18 ; H03H3/007 ; H03H9/205 ; H03H9/54 ; H03H9/15

Abstract:
A monolithic integration of phase change material (PCM) switches with a MEMS resonator is provided to implement switching and reconfiguration functionalities. MEMS resonator includes a piezoelectric material to control terminal connections to the electrodes. The PCM is operable between an ON state and an OFF state by application of heat, which causes the phase change material to change from an amorphous state to a crystalline state or from a crystalline state to an amorphous state, the amorphous state and the crystalline state each associated with one of the ON state and the OFF state. A method of fabricating the MEMS resonator with phase change material is provided. A reconfigurable filter system using the MEMS resonators is also provided.
Public/Granted literature
- US20170187347A1 Piezoelectric MEMS Resonator with Integrated Phase Change Material Switches Public/Granted day:2017-06-29
Information query
IPC分类: