Invention Grant
- Patent Title: Vapor deposition mask and organic EL display device
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Application No.: US16010549Application Date: 2018-06-18
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Publication No.: US10450646B2Publication Date: 2019-10-22
- Inventor: Toshihiro Sato , Takeshi Ookawara
- Applicant: Japan Display Inc.
- Applicant Address: JP Tokyo
- Assignee: Japan Display Inc.
- Current Assignee: Japan Display Inc.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2014-205457 20141006
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; H01L51/50 ; H01L21/308 ; H01L21/033 ; C23C14/24 ; H01L21/027 ; C23C8/04

Abstract:
The purpose is providing a vapor deposition mask with high rigidity which can evaporate a uniform thickness film. A vapor deposition mask including a mask body having a main opening, a side surface of the main opening, an upper surface intersecting the side surface, and a lower surface opposing the upper surface, a first insulator contacting the lower surface, and a second insulator contacting the upper and side surfaces, wherein the first insulator includes a first region inside the main opening, and a first opening in the first region, the second insulator includes a second region inside the main opening, and a second opening in the second region, the mask body is sandwiched between the first and second insulators, and one of the first and second insulators includes a region located inside the main opening more centrally than the other and not overlapping with the other and the mask body.
Public/Granted literature
- US20180298482A1 VAPOR DEPOSITION MASK AND ORGANIC EL DISPLAY DEVICE Public/Granted day:2018-10-18
Information query
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