• Patent Title: Method for transferring monocrystalline pads
  • Application No.: US15759457
    Application Date: 2016-09-19
  • Publication No.: US10453739B2
    Publication Date: 2019-10-22
  • Inventor: Bruno Ghyselen
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1558810 20150918
  • International Application: PCT/FR2016/052363 WO 20160919
  • International Announcement: WO2017/046548 WO 20170323
  • Main IPC: H01L21/762
  • IPC: H01L21/762 C30B25/18 C30B33/06 H01S5/02
Method for transferring monocrystalline pads
Abstract:
A method of transferring blocks of semiconductor material to a substrate comprises the following steps: a. providing an intermediate substrate, the intermediate substrate comprising, on one of its faces, blocks, the blocks comprise a monocrystalline material, the blocks comprising an embrittlement area delimiting a block portion intended to be transferred onto a final substrate; b. executing an assembling step by putting a free surface of each of the blocks in contact with the final substrate; and c. executing, after the assembling step, detachment at the embrittlement area of each of the blocks. During the assembling step, the intermediate substrate deforms so that the free surfaces of the blocks become coplanar.
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