Invention Grant
- Patent Title: Wafer-level packaging for enhanced performance
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Application No.: US15992639Application Date: 2018-05-30
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Publication No.: US10453765B2Publication Date: 2019-10-22
- Inventor: Julio C. Costa , Merrill Albert Hatcher, Jr. , Peter V. Wright , Jon Chadwick
- Applicant: Qorvo US, Inc.
- Applicant Address: US NC Greensboro
- Assignee: Qorvo US, Inc.
- Current Assignee: Qorvo US, Inc.
- Current Assignee Address: US NC Greensboro
- Agency: Withrow & Terranova, P.L.L.C.
- Main IPC: H01L23/31
- IPC: H01L23/31 ; H01L21/56 ; H01L21/78 ; H01L23/367 ; H01L23/498 ; H01L21/3105 ; H01L23/00 ; H01L23/50 ; H01L23/29 ; H01L21/762 ; H01L21/311 ; H01L23/544

Abstract:
The present disclosure relates to a wafer-level packaging process. According to an exemplary process, a precursor wafer that includes a device layer with a number of input/output (I/O) contacts, a number of bump structures over the device layer, the stop layer underneath the device layer, and a silicon handle layer underneath the stop layer is provided. Herein, each bump structure is electronically coupled to a corresponding I/O contact. A first mold compound is then applied over the device layer to encapsulate each bump structure. Next, the silicon handle layer is removed substantially. A second mold compound is applied to an exposed surface from which the silicon handle layer was removed. Finally, the first mold compound is thinned down to expose a portion of each bump structure.
Public/Granted literature
- US10418297B2 Wafer-level packaging for enhanced performance Public/Granted day:2019-09-17
Information query
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