Invention Grant
- Patent Title: Ultrasound sensor and driving method therefor
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Application No.: US15077132Application Date: 2016-03-22
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Publication No.: US10454018B2Publication Date: 2019-10-22
- Inventor: Chikara Kojima
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2015-061754 20150324
- Main IPC: H01L41/113
- IPC: H01L41/113 ; H01L41/09 ; B06B1/06 ; H01L41/187 ; G01S7/521 ; G01S7/524

Abstract:
An ultrasound sensor includes a substrate in which a space is formed, a diaphragm provided on the substrate so as to block the space, a piezoelectric element which is provided on the diaphragm and includes a first electrode, a piezoelectric layer, and a second electrode, and an acoustic matching layer provided on a periphery of the piezoelectric element or in the space, in which the diaphragm has a bend in which a region corresponding to the space becomes convex (upwardly convex) to the opposite side to the space in a state where a voltage is not applied to the piezoelectric element, and a relaxation time of the polarization of the piezoelectric layer in the piezoelectric element is a repeating transmission period of the ultrasound sensor or less.
Public/Granted literature
- US20160284972A1 ULTRASOUND SENSOR AND DRIVING METHOD THEREFOR Public/Granted day:2016-09-29
Information query
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