Ultrasound sensor and driving method therefor
Abstract:
An ultrasound sensor includes a substrate in which a space is formed, a diaphragm provided on the substrate so as to block the space, a piezoelectric element which is provided on the diaphragm and includes a first electrode, a piezoelectric layer, and a second electrode, and an acoustic matching layer provided on a periphery of the piezoelectric element or in the space, in which the diaphragm has a bend in which a region corresponding to the space becomes convex (upwardly convex) to the opposite side to the space in a state where a voltage is not applied to the piezoelectric element, and a relaxation time of the polarization of the piezoelectric layer in the piezoelectric element is a repeating transmission period of the ultrasound sensor or less.
Public/Granted literature
Information query
Patent Agency Ranking
0/0