Invention Grant
- Patent Title: Susceptor
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Application No.: US14914728Application Date: 2014-08-13
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Publication No.: US10460965B2Publication Date: 2019-10-29
- Inventor: Fumiya Kobayashi
- Applicant: BRIDGESTONE CORPORATION
- Applicant Address: JP Owariasahi, Aichi
- Assignee: MARUWA CO., LTD.
- Current Assignee: MARUWA CO., LTD.
- Current Assignee Address: JP Owariasahi, Aichi
- Agency: Shumaker, Loop & Kendrick, LLP
- Priority: JP2013-177762 20130829
- International Application: PCT/JP2014/071377 WO 20140813
- International Announcement: WO2015/029786 WO 20150305
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H01L21/67 ; H01L21/687 ; C23C16/458

Abstract:
A bearing (12) being a recessed section that receives a spindle (20) is provided in a lower surface (10B) of a susceptor (10). The bearing (12) has a tapers from the lower surface (10B) towards an upper surface (10A). A gap (12B) is provided in an side wall (12A) of the bearing (12), further on the outside of the bearing (12) than a fitting surface (12X) between the bearing (12) and the spindle (20) in the horizontal direction. As a result, reduction in the fitting force between the susceptor bearing and the spindle can be suppressed and susceptor temperature reduction in the vicinity of the bearing can also be suppressed.
Public/Granted literature
- US20160218024A1 SUSCEPTOR Public/Granted day:2016-07-28
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