Invention Grant
- Patent Title: Electrostatic chuck
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Application No.: US15903175Application Date: 2018-02-23
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Publication No.: US10460970B2Publication Date: 2019-10-29
- Inventor: Morimichi Watanabe , Tsutomu Nanataki
- Applicant: NGK INSULATORS, LTD.
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown, PLLC
- Priority: JP2015-193943 20150930; JP2015-193944 20150930; JP2016-100720 20160519
- Main IPC: H01L21/683
- IPC: H01L21/683 ; C04B35/111 ; C04B35/101 ; C04B35/634 ; C04B35/64 ; B32B18/00 ; C04B35/626 ; C04B35/638 ; C04B35/645 ; C04B37/00 ; H01L21/687

Abstract:
An electrostatic chuck includes a dielectric layer including an oriented alumina sintered body having a degree of c-plane orientation of 5% or more, the degree of c-plane orientation being determined by a Lotgering method using an X-ray diffraction profile obtained by the irradiation of an X-ray in the 2θ range of 20° to 70°; a ceramic layer integrated with a surface disposed opposite a wafer placement surface of the dielectric layer; and an electrostatic electrode between the dielectric layer and the ceramic layer.
Public/Granted literature
- US20180190527A1 ELECTROSTATIC CHUCK Public/Granted day:2018-07-05
Information query
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