Invention Grant
- Patent Title: Method for making CMOS image sensor including photodiodes with overlying superlattices to reduce crosstalk
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Application No.: US15843121Application Date: 2017-12-15
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Publication No.: US10461118B2Publication Date: 2019-10-29
- Inventor: Yi-Ann Chen , Abid Husain , Hideki Takeuchi
- Applicant: ATOMERA INCORPORATED
- Applicant Address: US CA Los Gatos
- Assignee: ATOMERA INCORPORATED
- Current Assignee: ATOMERA INCORPORATED
- Current Assignee Address: US CA Los Gatos
- Agency: Allen, Dyer, Doppelt, + Gilchrist, P.A. Attorneys at Law
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L31/109 ; H01L31/0352

Abstract:
A method for making a CMOS image sensor may include forming a plurality of laterally adjacent photodiodes on a semiconductor substrate having a first conductivity types by forming a retrograde well extending downward into the substrate from a surface thereof and having a second conductivity type, forming a first well around a periphery of the retrograde well also having the second conductivity type, and forming a second well within the retrograde well having the first conductivity type. Furthermore, first and second superlattices may be respectively formed overlying each of the first and second wells, with each of the first and second superlattices comprising a plurality of stacked groups of layers, and each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.
Public/Granted literature
Information query
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