Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
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Application No.: US15861949Application Date: 2018-01-04
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Publication No.: US10461167B2Publication Date: 2019-10-29
- Inventor: Dongsoo Lee , Wonkeun Chung , Hoonjoo Na , Suyoung Bae , Jaeyeol Song , Jonghan Lee , HyungSuk Jung , Sangjin Hyun
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2017-0079888 20170623
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L21/82 ; H01L29/66 ; H01L29/78 ; H01L21/02 ; H01L29/06 ; H01L29/36

Abstract:
Disclosed are semiconductor devices and methods of manufacturing the same. The semiconductor device comprises a first transistor on a substrate, and a second transistor on the substrate. Each of the first and second transistors includes a plurality of semiconductor patterns vertically stacked on the substrate and vertically spaced apart from each other, and a gate dielectric pattern and a work function pattern filling a space between the semiconductor patterns. The work function pattern of the first transistor includes a first work function metal layer, the work function pattern of the second transistor includes the first work function metal layer and a second work function metal layer, the first work function metal layer of each of the first and second transistors has a work function greater than that of the second work function metal layer, and the first transistor has a threshold voltage less than that of the second transistor.
Public/Granted literature
- US20180374926A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2018-12-27
Information query
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