Invention Grant
- Patent Title: Process for producing an array of mesa-structured photodiodes
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Application No.: US15959829Application Date: 2018-04-23
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Publication No.: US10461211B2Publication Date: 2019-10-29
- Inventor: Giacomo Badano , Clement Lobre , Roch Espiau de Lamaestre , Jean-Paul Chamonal
- Applicant: Commissariat a l'energie atomique et aux energies alternatives
- Applicant Address: FR Paris
- Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR1753514 20170424
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L27/144 ; H01L31/0352 ; H01L31/103 ; H01L31/02 ; H01L31/0296 ; H01L31/102

Abstract:
The invention pertains to a process for producing an array (1) of mesa-structured photodiodes (2), including at least the following steps:a) producing a useful layer (3);b) producing an etch mask formed of a plurality of etch pads (20);c) wet-etching part of the useful layer (3) located between the etch pads (20), forming a plurality of mesa-structured photodiodes (2), producing a recess (21);d) conformally depositing a passivation layer (14);e) removing the etch pads (20) by chemical dissolution;f) producing conductive pads (11).
Public/Granted literature
- US20180309016A1 PROCESS FOR PRODUCING AN ARRAY OF MESA-STRUCTURED PHOTODIODES Public/Granted day:2018-10-25
Information query
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