Invention Grant
- Patent Title: Method for depositing protection film of light-emitting element
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Application No.: US16189452Application Date: 2018-11-13
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Publication No.: US10461282B2Publication Date: 2019-10-29
- Inventor: Hong-Jae Lee , Jong-Hwan Kim , Woo-Pil Shim , Woo-Jin Lee , Sung-Yean Yoon , Don-Hee Lee
- Applicant: TES CO., LTD
- Applicant Address: KR Yongin, Gyeonggi-do
- Assignee: TES CO., LTD
- Current Assignee: TES CO., LTD
- Current Assignee Address: KR Yongin, Gyeonggi-do
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Kongsik Kim; Jhongwoo Jay Peck
- Priority: KR10-2016-0059944 20160517
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L51/56 ; H01L51/52 ; H01L21/02
Abstract:
The present invention relates to a method of depositing a protection film for a light-emitting element, the method comprising the steps of: depositing a first inorganic protection layer on a light-emitting element on a substrate; and depositing a second inorganic protection layer, having comparatively smaller internal stress than the first inorganic protection layer, on the first inorganic protection layer.
Public/Granted literature
- US20190081283A1 Method For Depositing Protection Film Of Light-Emitting Element Public/Granted day:2019-03-14
Information query
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