Invention Grant
- Patent Title: Patterning conductive films using variable focal plane to control feature size
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Application No.: US14768595Application Date: 2014-02-21
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Publication No.: US10464172B2Publication Date: 2019-11-05
- Inventor: Robert J. Martinsen , Adam Dittli , Ken Gross
- Applicant: nLIGHT Photonics Corporation
- Applicant Address: US OR Tualatin
- Assignee: nLIGHT, Inc.
- Current Assignee: nLIGHT, Inc.
- Current Assignee Address: US OR Tualatin
- Agency: Klarquist Sparkman, LLP
- International Application: PCT/US2014/017836 WO 20140221
- International Announcement: WO2014/130892 WO 20140828
- Main IPC: G02B26/08
- IPC: G02B26/08 ; B23K26/40 ; G02B26/10 ; H01L31/18 ; B23K26/361 ; B23K103/00

Abstract:
A processing system directs a laser beam to a composite including a substrate, a conductive layer, and a conductive border. The location of a focus of the laser beam can be controlled to bring the laser beam into focus on the surfaces of the conductive materials. The laser beam can be used to ablatively process the conductive border and non-ablatively process the conductive layer by translating a focus-adjust optical system so as to vary laser beam diameter.
Public/Granted literature
- US20160001402A1 PATTERNING CONDUCTIVE FILMS USING VARIABLE FOCAL PLANE TO CONTROL FEATURE SIZE Public/Granted day:2016-01-07
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