Invention Grant
- Patent Title: Hermetic conductive feedthroughs for a semiconductor wafer
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Application No.: US14050415Application Date: 2013-10-10
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Publication No.: US10464836B2Publication Date: 2019-11-05
- Inventor: David A. Ruben , Michael S. Sandlin
- Applicant: MEDTRONIC, INC.
- Applicant Address: US MN Minneapolis
- Assignee: Medtronic, Inc.
- Current Assignee: Medtronic, Inc.
- Current Assignee Address: US MN Minneapolis
- Main IPC: C03B23/20
- IPC: C03B23/20 ; H05K5/00 ; A61N1/375 ; H01L23/057 ; H01L23/10 ; B81C1/00

Abstract:
A glass wafer has an internal surface and an opposing external surface separated by a wafer thickness. A hermetic, electrically conductive feedthrough extends through the wafer from the internal surface to the opposing external surface. The feedthrough includes a feedthrough member having an inner face exposed along the internal surface for electrically coupling to an electrical circuit. The feedthrough member extends from the inner face partially through the wafer thickness to an exteriorly-facing outer face hermetically embedded within the wafer.
Public/Granted literature
- US20150101841A1 HERMETIC CONDUCTIVE FEEDTHROUGHS FOR A SEMICONDUCTOR WAFER Public/Granted day:2015-04-16
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