Invention Grant
- Patent Title: Method of producing an apparatus, apparatus and optoelectronic component
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Application No.: US15745084Application Date: 2016-09-29
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Publication No.: US10465284B2Publication Date: 2019-11-05
- Inventor: Andreas Rückerl
- Applicant: OSRAM Opto Semiconductors GmbH
- Applicant Address: DE Regensburg
- Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee: OSRAM OPTO SEMICONDUCTORS GMBH
- Current Assignee Address: DE Regensburg
- Agency: Slater Matsil, LLP
- International Application: PCT/EP2016/073345 WO 20160929
- International Announcement: WO2018/059702 WO 20180405
- Main IPC: C23C16/40
- IPC: C23C16/40 ; C23C16/455 ; C23C16/56 ; H01L51/52 ; H01L33/44
Abstract:
A method for producing an apparatus, an apparatus and an optoelectronic component are disclosed. In an embodiment the method includes providing a carrier, depositing an amorphous ALD layer on the carrier using an ALD method and recrystallizing the amorphous ALD layer into a crystalline layer.
Public/Granted literature
- US20190010607A1 Method of Producing an Apparatus, Apparatus and Optoelectronic Component Public/Granted day:2019-01-10
Information query
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