Invention Grant
- Patent Title: LED-based clean room lighting
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Application No.: US15680783Application Date: 2017-08-18
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Publication No.: US10465878B2Publication Date: 2019-11-05
- Inventor: Melanie Koehler , Armin Konrad
- Applicant: LEDVANCE GmbH
- Applicant Address: DE Garching Bei Munich
- Assignee: LEDVANCE GMBH
- Current Assignee: LEDVANCE GMBH
- Current Assignee Address: DE Garching Bei Munich
- Agency: Hayes Soloway PC
- Priority: DE102016115376 20160818
- Main IPC: F21V23/00
- IPC: F21V23/00 ; F21V9/00 ; F21K9/275 ; F21V23/04 ; F21Y103/10 ; F21Y115/10 ; F21Y113/13

Abstract:
A lighting device for room lighting in photolithography applications (in particular a retrofit lamp in sizes T5 and T8) comprises a light engine having a first light source which is configured to emit light in the wavelength range above approximately 500 nm and a second light source which is configured to emit light in a different wavelength range from the first light source. The first light source produces light in a spectral range within which photoresists used in photolithography are not sensitive. The second light source produces white light (either alone or in combination with the first light source).
Public/Granted literature
- US20180051864A1 LED-BASED CLEAN ROOM LIGHTING Public/Granted day:2018-02-22
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