Invention Grant
- Patent Title: Pressure sensor sub assembly and fabrication
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Application No.: US15349699Application Date: 2016-11-11
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Publication No.: US10466125B2Publication Date: 2019-11-05
- Inventor: David E. Wagner
- Applicant: Measurement Specialties, Inc.
- Applicant Address: US VA Hampton
- Assignee: Measurement Specialties Inc.
- Current Assignee: Measurement Specialties Inc.
- Current Assignee Address: US VA Hampton
- Agency: Howard IP Law Group
- Main IPC: G01L9/00
- IPC: G01L9/00 ; G01L13/02

Abstract:
A differential pressure sensor includes a first sensor housing member having a first fluid inlet port for receiving a first fluid at a first pressure and a second sensor housing member having a second fluid inlet port for receiving a second fluid at a second pressure. A pressure-sensing subassembly includes a semiconductor pressure-sensing die having a sensitive diaphragm for sensing pressure. The pressure-sensing subassembly is configured for insertion into the differential pressure sensor such that once inserted the first fluid inlet port is in fluid communication with a first surface of the sensitive diaphragm and the second fluid inlet port is in fluid communication with a second surface of the sensitive diaphragm.
Public/Granted literature
- US20180136063A1 PRESSURE SENSOR SUB ASSEMBLY AND FABRICATION Public/Granted day:2018-05-17
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