- Patent Title: Conductive probe, electrical property evaluating system, scanning probe microscope, conductive probe manufacturing method, and electrical property measuring method
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Application No.: US15701495Application Date: 2017-09-12
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Publication No.: US10466270B2Publication Date: 2019-11-05
- Inventor: Kazunori Harada
- Applicant: KABUSHIKI KAISHA TOSHIBA
- Applicant Address: JP Minato-ku
- Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee: KABUSHIKI KAISHA TOSHIBA
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2016-178212 20160913
- Main IPC: G01Q10/04
- IPC: G01Q10/04 ; G01Q60/30
Abstract:
A conductive probe includes a protruding portion provided on an elastic member, a conductive metal film covering at least a tip of the protruding portion; and an insulating thin film covering the conductive metal film provided on the tip of the protruding portion.
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