Invention Grant
- Patent Title: Thermal probe
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Application No.: US15736154Application Date: 2016-06-14
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Publication No.: US10466272B2Publication Date: 2019-11-05
- Inventor: Hamed Sadeghian Marnani , Roy Jacobus Franciscus Bijster
- Applicant: Nederlandse Organisatie voor toegepast—natuurwetenschappelijk onderzoek TNO
- Applicant Address: NL 's-Gravenhage
- Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
- Current Assignee Address: NL 's-Gravenhage
- Agency: Hoffmann & Baron, LLP
- Priority: EP15172036 20150615
- International Application: PCT/NL2016/050426 WO 20160614
- International Announcement: WO2016/204611 WO 20161222
- Main IPC: G01Q60/58
- IPC: G01Q60/58 ; G01K5/62 ; G01K5/64

Abstract:
Thermal probe (10) for a scanning thermal microscope (100), use, and process of manufacturing. The thermal probe (10) comprises a single-material (M1) thermal conducting body (12) consisting of a probe frame (14) ending in a probe tip (11). A bi-material (M1,M2) cantilever strip (13) is connected to the probe frame (14) in thermal communication with the probe tip (11). The cantilever strip (13) in unbended state lies in-plane (X,Z) with the probe tip (11). The cantilever strip (13) comprises layers of material (M1,M2) having different coefficients of thermal expansion configured to bend the cantilever strip (13) with respect to the single-material thermal conducting body (12) as a function of the heat exchange (H) between the probe tip (11) and the microscopic structure (2) for measuring heat exchange (H) with a sample interface (1) by means of measuring the bending of the cantilever strip (13).
Public/Granted literature
- US20180180644A1 THERMAL PROBE Public/Granted day:2018-06-28
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