Invention Grant
- Patent Title: Agent for resist hydrophilization treatment
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Application No.: US15893079Application Date: 2018-02-09
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Publication No.: US10466592B2Publication Date: 2019-11-05
- Inventor: Yuichi Sakanishi
- Applicant: DAICEL CORPORATION
- Applicant Address: JP Osaka-Shi
- Assignee: DAICEL CORPORATION
- Current Assignee: DAICEL CORPORATION
- Current Assignee Address: JP Osaka-Shi
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2017-023181 20170210
- Main IPC: G03F7/16
- IPC: G03F7/16 ; H01L21/308 ; H01L21/304 ; G03F7/32 ; G03F7/40 ; G03F7/039 ; H01L21/027 ; G03F7/38

Abstract:
Problem to be SolvedProvided is an agent for resist hydrophilization treatment that can hydrophilize a surface of a resist coating rapidly and stably while inhibiting deterioration of the resist coating.SolutionAn agent for resist hydrophilization treatment of the present invention comprises at least following components (A) and (B): component (A): a polyglycerol or a derivative thereof represented by following formula (a): RaO—(C3H6O2)n—H (a) wherein Ra represents a hydrogen atom, a hydrocarbon group having 1 to 18 carbon atoms optionally having a hydroxyl group, or an acyl group having 2 to 24 carbon atoms; and n represents an average polymerization degree of glycerol units shown in the parentheses, and is an integer from 2 to 60; component (B): water.
Public/Granted literature
- US20180231890A1 AGENT FOR RESIST HYDROPHILIZATION TREATMENT Public/Granted day:2018-08-16
Information query
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