Agent for resist hydrophilization treatment
Abstract:
Problem to be SolvedProvided is an agent for resist hydrophilization treatment that can hydrophilize a surface of a resist coating rapidly and stably while inhibiting deterioration of the resist coating.SolutionAn agent for resist hydrophilization treatment of the present invention comprises at least following components (A) and (B): component (A): a polyglycerol or a derivative thereof represented by following formula (a): RaO—(C3H6O2)n—H  (a) wherein Ra represents a hydrogen atom, a hydrocarbon group having 1 to 18 carbon atoms optionally having a hydroxyl group, or an acyl group having 2 to 24 carbon atoms; and n represents an average polymerization degree of glycerol units shown in the parentheses, and is an integer from 2 to 60; component (B): water.
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