Invention Grant
- Patent Title: Patterning method, lithography apparatus, and article manufacturing method
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Application No.: US16110417Application Date: 2018-08-23
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Publication No.: US10466602B2Publication Date: 2019-11-05
- Inventor: Taichi Yoshioka , Yusuke Kurita , Tohru Suzuki , Moritaka Iwakoshi , Taizou Kawada , Hironori Okazumi , Shunsuke Karaki , Takayuki Hashimoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2017-169606 20170904
- Main IPC: G03F9/00
- IPC: G03F9/00 ; G03F7/20 ; G03F1/00 ; G03F1/42

Abstract:
A lithography apparatus detects a plurality of first substrate-side marks arranged with respect to a part of shot regions on which patterning is to be performed by using the first original in the lithography apparatus and detects a plurality of second substrate-side marks arranged with respect to other shot regions different from the part of the shot regions on which patterning is to be performed by using the second original different from the first original in another lithography apparatus. The lithography apparatus outputs information on detection results of the plurality of second substrate-side marks to be available in the other lithography apparatus. Then, based on detection results of the plurality of first substrate-side marks, the lithography apparatus performs patterning while performing alignment with the first original with respect to the part of the shot regions.
Public/Granted literature
- US20190072864A1 PATTERNING METHOD, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING METHOD Public/Granted day:2019-03-07
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