Invention Grant
- Patent Title: Fluid droplet methodology and apparatus for imprint lithography
-
Application No.: US15375848Application Date: 2016-12-12
-
Publication No.: US10468247B2Publication Date: 2019-11-05
- Inventor: Edward Brian Fletcher , Zhengmao Ye
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Abel Schillinger, LLP
- Main IPC: H01L21/027
- IPC: H01L21/027 ; G03F7/00

Abstract:
A method can be used to generate a fluid droplet pattern for an imprint lithography process using a fluid dispense system having fluid dispense ports. The method can include determining a first fluid droplet pattern for the formable material dispensed at a preset minimum pitch or an integer multiple thereof; determining a second fluid droplet pattern based on the first fluid droplet pattern, wherein the second fluid droplet pattern is a non-integer multiple of the preset minimum pitch; determining an adjusted speed of the substrate and the fluid dispense ports relative to each other to generate the second fluid droplet pattern; moving the substrate and the fluid dispense ports relative to each other at the adjusted speed; and dispensing the formable material through the fluid dispense ports at the preset frequency to form the second fluid droplet pattern on the substrate.
Public/Granted literature
- US20180166349A1 FLUID DROPLET METHODOLOGY AND APPARATUS FOR IMPRINT LITHOGRAPHY Public/Granted day:2018-06-14
Information query
IPC分类: